Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA - Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference

We have developed a micromachined flow cell consisting of a flow channel integrated with micropipettes. The flow cell is used in combination with an optical trap set-up (optical tweezers) to study mechanical and structural properties of ADNA molecules. The flow cell was realised using silicon micromachining including the so-called buried channel technology to fabricate the micropipettes, the wet etching of glass to create the flow channel, and the powder blasting of glass to make the fluid connections. The volume of the flow cell is 211. The pipettes have a length of 130pm, a width of 5-10pm, a round opening of lpm and can be processed with different shapes. Using this flow cell we stretched single molecules (A-DNA) showing typical force-extension curves also found with conventional techniques. These pipettes can be also used for drug delivery, for injection of small gas bubbles into a liquid flow to monitor the streamlines, and for the mixing of two liquids to study diffusion effects. The paper describes the design, the fabrication and testing of the flow cell.